Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sang Ki Nam, Sunggil Kang, Sungyong Lim, Akira Koshiishi, Vasily Pashkovskiy +1 more | 2023-10-24 |
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Minhyoung KIM, Wonhyuk Jang, Hoseop Choi, Jeongmin Bang, Kyuhee Han | 2021-05-04 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Sungyong Lim +1 more | 2021-03-16 |