Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798788 | Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode | Sang Ki Nam, Sunggil Kang, Sungyong Lim, Beomjin Yoo, Akira Koshiishi +1 more | 2023-10-24 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Sunggil Kang, Beomjin Yoo, Sungyong Lim +1 more | 2021-03-16 |
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kyuhee Han | 2019-12-31 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Yeongkwang Lee, Sunggil Kang, Sang Ki Nam, Kyuhee Han | 2019-07-09 |