Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289308 | Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method | Sangjin An, Minseop PARK, Chanyeong Jeong, Sunggil Kang | 2022-03-29 |
| 10553401 | Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor device | Yongkyun Park, Dongsoo Lee, Sangheon Lee | 2020-02-04 |
| 10522332 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Sunggil Kang, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-12-31 |
| 10347468 | Plasma processing system, electron beam generator, and method of fabricating semiconductor device | Sunggil Kang, Sang Ki Nam, Kwangyoub Heo, Kyuhee Han | 2019-07-09 |