Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553401 | Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor device | Yeongkwang Lee, Dongsoo Lee, Sangheon Lee | 2020-02-04 |
| 9048487 | Secondary battery and manufacturing method thereof | — | 2015-06-02 |