Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664242 | Cleaning solution production systems and methods, and plasma reaction tanks | Min Hyoung Kim, Sang Ki Nam, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2023-05-30 |
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Min Hyoung Kim, Sang Ki Nam, Lu Siqing, Won Hyuk Jang, Kyu-Hee Han | 2023-01-03 |
| 11107705 | Cleaning solution production systems and methods, and plasma reaction tanks | Min Hyoung Kim, Sang Ki Nam, Won Hyuk Jang, Kyu-Hee Han, Young Do Kim +1 more | 2021-08-31 |
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Yuri Barsukov, Vladimir Volynets, Dali Liu, Sang Jin An +2 more | 2019-09-17 |
| 10410874 | Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same | Sang Ki Nam, Kwang Heo, Jehun Woo, Sang Heon Lee, Masahiko Tomita +1 more | 2019-09-10 |