Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Yuri Barsukov, Dali Liu, Sang Jin An, Beom Jin Yoo +2 more | 2019-09-17 |
| 10249485 | Pulsed plasma analyzer and method for analyzing the same | Protopopov Vladimir, Young Do Kim, Yuri Barsukov, Sang Heon Lee, Sung Ho JANG | 2019-04-02 |
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Sang Jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho +2 more | 2018-01-09 |
| 9520301 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Go-jun Kim, Sang Jin An, Hee-jeon Yang, Sang Heon Lee, Sung-keun Cho +2 more | 2016-12-13 |
| 7804250 | Apparatus and method to generate plasma | Andrey Ushakov, Yuri Tolmachev, Won Ceak Pak, Vasily Pashkovskiy, Sung-Chang Park +1 more | 2010-09-28 |
| 7309961 | Driving frequency modulation system and method for plasma accelerator | Won-taek Park | 2007-12-18 |
| 7253572 | Electromagnetic induced accelerator based on coil-turn modulation | Won-taek Park, Young-eal Kim | 2007-08-07 |