Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2021-04-06 |
| 10249485 | Pulsed plasma analyzer and method for analyzing the same | Vladimir Volynets, Young Do Kim, Yuri Barsukov, Sang Heon Lee, Sung Ho JANG | 2019-04-02 |
| 10229818 | Apparatus for monitoring process chamber | Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2019-03-12 |