Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046451 | Plasma etching apparatus and method for operating the same | Nam-Kyun Kim, Seung Bo Shim, Seung-han Baek, Ju-Ho Lee | 2024-07-23 |
| 11735396 | Inductively coupled plasma processing apparatus | Seung Bo Shim, Ho-Jun Lee, Jee Hun Jeong, Sung-Hwan Cho, Ju-Hong Cha | 2023-08-22 |
| 11501953 | Plasma processing equipment | Seung Bo Shim, Young-Jin Noh, Yong-Woo Lee, Ji-Soo Im, HYEONG MO KANG +3 more | 2022-11-15 |
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2021-04-06 |
| 10964511 | Semiconductor manufacturing device and method of operating the same | Seung Bo Shim, Myung Sun Choi, Nam Jun KANG, Sang Min Jeong, Peter Byung H Han | 2021-03-30 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |
| 10629467 | Electrostatic chuck and plasma apparatus for processing substrates having the same | Ohyung Kwon, Kyung-Sun Kim, Jae Hoon Kim | 2020-04-21 |
| 10566176 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Vasily Pashkovskiy, Ki Ho Hwang | 2020-02-18 |
| 10481005 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Se Jin Oh, Tae-Kyun Kang, Yu Sin Kim, Jae Ik KIM, Chan-Bin Mo +3 more | 2019-11-19 |
| 10395900 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2019-08-27 |
| 10276349 | Plasma processing device | Hak-young KIM, Ji-Myoung Lee, Ji Hee Kim, Kyeong Seok Jeong, Seong-Chul Choi | 2019-04-30 |
| 10229818 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2019-03-12 |
| 9601397 | Microwave probe, plasma monitoring system including the microwave probe, and method for fabricating semiconductor device using the system | Se Jin Oh, Woong Ko, Vasily Pashkovskiy, Ki Ho Hwang | 2017-03-21 |
| 9564295 | Diagnosis system for pulsed plasma | Dong Soo Lee, Sung Ho JANG, Byeong-Hee Kim, Dong Ok SHIN | 2017-02-07 |
| 9378931 | Pulse plasma apparatus and drive method thereof | Ohyung Kwon, Namjun Kang, Jung-Hyun Cho | 2016-06-28 |
| 8062538 | Etching apparatus and method for semiconductor device | Tae-Yong Kwon, Kyung Hyun Han, Kyung Chun Lim, Sang Min Jeong | 2011-11-22 |