Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837496 | Substrate processing apparatus and method of processing a substrate | Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2023-12-05 |
| 11521836 | Plasma processing apparatus | Eun-Woo Lee, Kyo-Hyeok Kim, Hyo Sung Kim, Seung Bo Shim, Kyung-Hoon Lee +3 more | 2022-12-06 |
| 11521866 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2022-12-06 |
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Sang Rok Oh +3 more | 2022-11-15 |
| 11437222 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Jung Pyo Hong, Jung-Mo Sung | 2022-09-06 |
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2022-09-06 |
| 11289309 | Device for providing gas to a plasma chamber and a plasma processing device including the same | Hyung Jun Kim, Kwang-Nam Kim, Sung Yeon Kim, Sang Rok Oh, Jung Pyo Hong | 2022-03-29 |
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Dong Hyeon NA, Seung Bo Shim, Ha Dong JIN, Min Hur, Kyo-Hyeok Kim +1 more | 2022-03-22 |
| 11037806 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2021-06-15 |
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Kwang-Nam Kim, Sung Yeon Kim, Hyung Jun Kim, Sang Rok Oh, Jung Pyo Hong | 2021-06-15 |
| 11018046 | Substrate processing apparatus including edge ring | Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Sang Rok Oh +3 more | 2021-04-06 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2021-03-30 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Doug Yong Sung, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |
| 10825666 | Plasma monitoring apparatus and plasma processing system | Kyeong-Hun KIM, Jeong-Il Mun, Hyung Joo Lee, Dong Kyu Kim | 2020-11-03 |
| 10790122 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Jung Pyo Hong, Jung-Mo Sung | 2020-09-29 |
| 10753800 | Calibrator of an optical emission spectroscopy | Jeong-Il Mun, Hyung Joo Lee, Ja Myung GU, Jae Woong Hwang, Jong Hwan An | 2020-08-25 |
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Jeong-Il Mun, Kyeong-Hun KIM, See Yub Yang, Hyung Joo Lee | 2020-08-18 |
| 10395900 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Doug Yong Sung, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2019-08-27 |
| 10062550 | Substrate processing apparatus | Jung Pyo Hong, Kwang-Nam Kim, Sang-Dong Kwon, Sang Rok Oh, Yong Moon Jang | 2018-08-28 |
| 7629589 | Apparatus and method for controlling ion beam | Sung-Wook Hwang, Do-Haing Lee, Chul-Ho Shin | 2009-12-08 |