Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837496 | Substrate processing apparatus and method of processing a substrate | Jong-Woo Sun, Sung Moon Park, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2023-12-05 |
| 11521866 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Jin Young Park | 2022-12-06 |
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2022-09-06 |
| 11037806 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Jin Young Park | 2021-06-15 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Sung Moon Park, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2021-03-30 |
| 10892142 | System for fabricating a semiconductor device | SangJean Jeon, Jinyoung Park, Chanhoon Park, Hoyong Park, Jin-young Bang +2 more | 2021-01-12 |
| 10720491 | Method of fabricating semiconductor devices | Jun Ho Yoon, Won Chul Lee, Sung Yeon Kim, Jae Hong Park, Chan Hoon Park +1 more | 2020-07-21 |
| 10319805 | Method of fabricating semiconductor devices | Jun Ho Yoon, Won Chul Lee, Sung Yeon Kim, Jae Hong Park, Chan Hoon Park +1 more | 2019-06-11 |
| 9812335 | Method of forming fine pattern of semiconductor device | Junho Yoon, Kyohyeok Kim, Dongchan Kim, Sungyeon KIM, Jaehong Park +2 more | 2017-11-07 |
| 9799561 | Method for fabricating a semiconductor device | Chan Hoon Park, Dong Chan Kim, Masayuki Tomoyasu | 2017-10-24 |
| 9647056 | Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode | Junho Yoon, Gyungjin Min, Jaehong Park, Yongmoon Jang | 2017-05-09 |
| 9607853 | Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method | Kyung-yub Jeon, Dong Chan Kim, Gyung-jin Min, Jae Hong Park | 2017-03-28 |
| 9240441 | Semiconductor devices including a support for an electrode and methods of forming semiconductor devices including a support for an electrode | Junho Yoon, Gyungjin Min, Jaehong Park, Yongmoon Jang | 2016-01-19 |
| 9230808 | Method of fabricating semiconductor device using photo key | Jun Ho Yoon, Dong Chan Kim, Gyung-jin Min, Jae Hong Park, Yong Moon Jang | 2016-01-05 |
| 9123657 | Method of fabricating semiconductor devices | Minjoon Park, Junho Yoon, Chan-Won Kim | 2015-09-01 |
| 9093500 | Methods of forming semiconductor device using bowing control layer | Jae Hong Park, Min-Joon Park, Jun Ho Yoon, Gyung-jin Min, Jin Young Park | 2015-07-28 |
| 8969167 | Methods of fabricating a semiconductor device with capacitors using mold structure and protection layer | Junho Yoon, Dongchan Kim, Gyungjin Min, Jaehong Park, Yongmoon Jang | 2015-03-03 |
| 8822341 | Methods of manufacturing semiconductor devices | Yong-Ho Jeon, Dong Hyun Kim, Kyoung-Sub Shin | 2014-09-02 |
| 8815697 | Method of fabricating semiconductor device | Jun Ho Yoon, Bong-Jin Kuh, Ki-Chul Kim, Gyung-jin Min, Tae Jin Park +8 more | 2014-08-26 |
| 8563371 | Method of forming semiconductor device | Kyung-yub Jeon, Kyoung-Sub Shin, Jun Ho Yoon | 2013-10-22 |
| 7550391 | Method for forming fine patterns of a semiconductor device using double patterning | Kyung-yub Jeon, Myeong-Cheol Kim, Hak-Sun Lee | 2009-06-23 |