Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443988 | Semiconductor device and method for manufacturing the same | — | 2022-09-13 |
| 10892347 | Vertical tunneling field effect transistor and method for manufacturing the same | Tae-Yong Kwon, Oh-Seong Kwon, Soo Yeon Jeong, Yong Hee Park, Jong-Ryeol Yoo | 2021-01-12 |
| 10840150 | Semiconductor device and method for manufacturing the same | — | 2020-11-17 |
| 10804160 | Semiconductor device and method of manufacturing the same | Soo Yeon Jeong, Jae-Kwang Choi | 2020-10-13 |
| 10566207 | Semiconductor manufacturing methods for patterning line patterns to have reduced length variation | Gyeongseop Kim, Seul Gi HAN | 2020-02-18 |
| 10566326 | Semiconductor devices including a device isolation region in a substrate and/or fin | Dae Young Kwak, Ki Byung Park, Kyoung-Hwan Yeo, Seung Jae Lee, Seung Seok HA +1 more | 2020-02-18 |
| 10373878 | Semiconductor device and method of manufacturing the same | Soo Yeon Jeong, Jae-Kwang Choi | 2019-08-06 |
| 10164057 | Vertical tunneling field effect transistor and method for manufacturing the same | Tae-Yong Kwon, Oh-Seong Kwon, Soo Yeon Jeong, Yong Hee Park, Jong-Ryeol Yoo | 2018-12-25 |
| 9899497 | Method of fabricating semiconductor device | Jin-Bum Kim, Kang Hun Moon, Choeun Lee, Sujin Jung, Haegeon Jung +1 more | 2018-02-20 |
| 9754770 | Method and apparatus of diagnosing plasma in plasma space | Jeong Yun Lee, Chin-Wook Chung | 2017-09-05 |
| 9607853 | Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method | Dong Chan Kim, Gyung-jin Min, Jae Hong Park, Je-Woo Han | 2017-03-28 |
| 9136094 | Method of plasma processing and apparatuses using the method | Jung-Hyun Cho, Hyung Joon Kim, Sang Jean Jeon, Sang Heon Lee, Jeong Yun Lee +1 more | 2015-09-15 |
| 9105452 | Etching apparatus and etching method | Jeong Yun Lee, Kyung-Sun Kim, Tae Gon Kim | 2015-08-11 |
| 8563371 | Method of forming semiconductor device | Kyoung-Sub Shin, Jun Ho Yoon, Je-Woo Han | 2013-10-22 |
| 8349200 | Method of fine patterning semiconductor device | Shi-Yong Yi, Myeong-Cheol Kim, Dong Ki Yoon, Ji-Hoon Cha | 2013-01-08 |
| 8039345 | Methods of forming semiconductor devices | Jong-Heui Song, Song Yang | 2011-10-18 |
| 8029688 | Method of fine patterning semiconductor device | Shi-Yong Yi, Myeong-Cheol Kim, Dong Ki Yoon, Ji-Hoon Cha | 2011-10-04 |
| 7998874 | Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same | Hak-Sun Lee, Myeong-Cheol Kim, Cha-Won Koh, Ji-Young Lee | 2011-08-16 |
| 7935635 | Method of forming fine patterns of semiconductor devices using double patterning | Myeong-Cheol Kim, Doo-Youl Lee, Hak-Sun Lee | 2011-05-03 |
| 7601647 | Method of forming fine patterns of semiconductor device using double patterning | Myeong-Cheol Kim, Hak-Sun Lee | 2009-10-13 |
| 7576010 | Method of forming pattern using fine pitch hard mask | Ji-Young Lee, Hak-Sun Lee, Myeong-Cheol Kim | 2009-08-18 |
| 7550391 | Method for forming fine patterns of a semiconductor device using double patterning | Myeong-Cheol Kim, Hak-Sun Lee, Je-Woo Han | 2009-06-23 |