Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12233501 | Substrate support device | Hyun-Sang Hwang | 2025-02-25 |
| 9773645 | Remote plasma generator using ceramic | Ja Woo Lee, Chung Huan Jeon, Heok-Jae Lee, Jang-Hyoun Youm, Kwang Young Jung +7 more | 2017-09-26 |
| 9136094 | Method of plasma processing and apparatuses using the method | Jung-Hyun Cho, Hyung Joon Kim, Sang Heon Lee, Jeong Yun Lee, Kyung-yub Jeon +1 more | 2015-09-15 |
| 9105581 | Method of processing a substrate and apparatus for performing the same | Sam Kim, Gon-jun Kim, Volynets Vladmir, Yong-Kyun Park, In-Cheol Song +1 more | 2015-08-11 |
| 8404080 | Apparatus to treat a substrate | Jong Rok Park, Sung-yeup Sa, Hee-jeon Yang, Guen Suk Lee | 2013-03-26 |
| 8343309 | Substrate processing apparatus | Chin-Wook Chung, Guen Suk Lee, Seung Yuop Sa, Hyung Chul Cho | 2013-01-01 |
| 8169148 | Plasma generating apparatus | Yuri Tolmachev, Su Ho Lee, Seoung Hyun Seok, Young Min Park, Won Hyuk Jang | 2012-05-01 |