Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134567 | Microwave plasma processing apparatus | Jin Hyuk Choi, Sang Chul Han, Jong Il Kee, Young Dong LEE, Seung-Hun Oh | 2018-11-20 |
| 8980047 | Microwave plasma processing apparatus | Jin Hyuk Choi, Sang Chul Han, Jong Il Kee, Young Dong LEE, Seung-Hun Oh | 2015-03-17 |
| 8404080 | Apparatus to treat a substrate | Sang Jean Jeon, Jong Rok Park, Sung-yeup Sa, Hee-jeon Yang | 2013-03-26 |
| 8343309 | Substrate processing apparatus | Sang Jean Jeon, Chin-Wook Chung, Seung Yuop Sa, Hyung Chul Cho | 2013-01-01 |