Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Shinichi Kurita +1 more | 2025-07-15 |
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Shinichi Kurita +1 more | 2023-12-26 |
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Shinichi Kurita +1 more | 2021-08-17 |
| 10751765 | Remote plasma source cleaning nozzle for cleaning a gas distribution plate | Tae Kyung Won, Chien-Teh Kao, Soo Young Choi, Sanjay Yadav | 2020-08-25 |
| 10312475 | CVD thin film stress control method for display application | Tae Kyung Won, Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Chien-Teh Kao +1 more | 2019-06-04 |
| 10134567 | Microwave plasma processing apparatus | Jin Hyuk Choi, Sang Chul Han, Jong Il Kee, Guen Suk Lee, Seung-Hun Oh | 2018-11-20 |
| 9312124 | Methods of fabricating gate insulating layers in gate trenches and methods of fabricating semiconductor devices including the same | Tai-Su Park, Gun-Joong Lee, Sang Chul Han, Joo-Byoung Yoon | 2016-04-12 |
| 8980047 | Microwave plasma processing apparatus | Jin Hyuk Choi, Sang Chul Han, Jong Il Kee, Guen Suk Lee, Seung-Hun Oh | 2015-03-17 |
| 8835275 | Semiconductor devices having nitrided gate insulating layer and methods of fabricating the same | Tai-Su Park, Jin Hyuk Choi, Sang Chul Han, Jung-Sup Oh | 2014-09-16 |
| 8039772 | Microwave resonance plasma generating apparatus and plasma processing system having the same | Igor Kossyi, Mamikon Aramovich Misakyan, Merab Ivanovich Taktakishvili | 2011-10-18 |
| 7999474 | Flat lamp using plasma discharge | Hidekazu Hatanaka, Seung-Hyun Son, Jai-kwang Shin, Young-mo Kim | 2011-08-16 |
| 7615928 | Light emitting device using plasma discharge | Hidekazu Hatanaka, Seung-Hyun Son, Jai-kwang Shin, Young-mo Kim | 2009-11-10 |
| 7381292 | Inductively coupled plasma generating apparatus incorporating serpentine coil antenna | Yuri Tolmachev, Seong-gu Kim, Jai-kwang Shin | 2008-06-03 |