Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |
| 11967516 | Substrate support for chucking of mask for deposition processes | Jrjyan Jerry CHEN, Tae Kyung Won, Jun Li, ShouQian Shao, Surendra Kanimihally Setty | 2024-04-23 |
| 11854771 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more | 2023-12-26 |
| 11770964 | Thin-film encapsulation | Tae Kyung Won, Soo Young Choi | 2023-09-26 |
| 11094508 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more | 2021-08-17 |
| 11053592 | Substrate temperature monitoring | — | 2021-07-06 |
| 10991916 | Thin-film encapsulation | Tae Kyung Won, Soo Young Choi | 2021-04-27 |
| 10751765 | Remote plasma source cleaning nozzle for cleaning a gas distribution plate | Tae Kyung Won, Young Dong LEE, Chien-Teh Kao, Soo Young Choi | 2020-08-25 |
| 10697063 | Corner spoiler for improving profile uniformity | Lai ZHAO, Gaku Furuta, Qunhua Wang, Robin L. Tiner, Beom Soo Park +1 more | 2020-06-30 |
| 10312475 | CVD thin film stress control method for display application | Tae Kyung Won, Soo Young Choi, Carl A. Sorensen, Chien-Teh Kao, Suhail Anwar +1 more | 2019-06-04 |
| 8404502 | Water-barrier encapsulation method | Tae Kyung Won, Jose Manuel Dieguez Campo, John M. White | 2013-03-26 |
| 8002896 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Qunhua Wang, Quanyuan Shang, William Harshbarger | 2011-08-23 |
| 7951620 | Water-barrier encapsulation method | Tae Kyung Won, Jose Manuel Dieguez Campo | 2011-05-31 |
| 7504332 | Water-barrier performance of an encapsulating film | Tae Kyung Won | 2009-03-17 |
| 7214600 | Method to improve transmittance of an encapsulating film | Tae Kyung Won | 2007-05-08 |
| 7183197 | Water-barrier performance of an encapsulating film | Tae Kyung Won | 2007-02-27 |
| 7031600 | Method and apparatus for silicon oxide deposition on large area substrates | Quanyuan Shang, Wendell T. Blonigan | 2006-04-18 |
| 6981508 | On-site cleaning gas generation for process chamber cleaning | Quanyuan Shang, William Harshbarger, Kam S. Law | 2006-01-03 |
| 6960263 | Shadow frame with cross beam for semiconductor equipment | Sakae Tanaka, Qunhua Wang, Quanyuan Shang, William Harshbarger | 2005-11-01 |
| 6896929 | Susceptor shaft vacuum pumping | Quanyuan Shang, Ernst Keller, Wei-Line Chang | 2005-05-24 |
| 6857387 | Multiple frequency plasma chamber with grounding capacitor at cathode | Sheng Sun, Jeff Olsen, Quanyuan Shang, Kam S. Law | 2005-02-22 |
| 6843258 | On-site cleaning gas generation for process chamber cleaning | Quanyuan Shang, William Harshbarger, Kam S. Law | 2005-01-18 |
| 6825134 | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow | Kam S. Law, Quanyuan Shang, William Harshbarger, Dan Maydan, Soo Young Choi +2 more | 2004-11-30 |