| 12362149 |
Film stress control for plasma enhanced chemical vapor deposition |
Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more |
2025-07-15 |
| 11967516 |
Substrate support for chucking of mask for deposition processes |
Jrjyan Jerry CHEN, Tae Kyung Won, Jun Li, ShouQian Shao, Surendra Kanimihally Setty |
2024-04-23 |
| 11854771 |
Film stress control for plasma enhanced chemical vapor deposition |
Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more |
2023-12-26 |
| 11770964 |
Thin-film encapsulation |
Tae Kyung Won, Soo Young Choi |
2023-09-26 |
| 11094508 |
Film stress control for plasma enhanced chemical vapor deposition |
Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more |
2021-08-17 |
| 11053592 |
Substrate temperature monitoring |
— |
2021-07-06 |
| 10991916 |
Thin-film encapsulation |
Tae Kyung Won, Soo Young Choi |
2021-04-27 |
| 10751765 |
Remote plasma source cleaning nozzle for cleaning a gas distribution plate |
Tae Kyung Won, Young Dong LEE, Chien-Teh Kao, Soo Young Choi |
2020-08-25 |
| 10697063 |
Corner spoiler for improving profile uniformity |
Lai ZHAO, Gaku Furuta, Qunhua Wang, Robin L. Tiner, Beom Soo Park +1 more |
2020-06-30 |
| 10312475 |
CVD thin film stress control method for display application |
Tae Kyung Won, Soo Young Choi, Carl A. Sorensen, Chien-Teh Kao, Suhail Anwar +1 more |
2019-06-04 |
| 8404502 |
Water-barrier encapsulation method |
Tae Kyung Won, Jose Manuel Dieguez Campo, John M. White |
2013-03-26 |
| 8002896 |
Shadow frame with cross beam for semiconductor equipment |
Sakae Tanaka, Qunhua Wang, Quanyuan Shang, William Harshbarger |
2011-08-23 |
| 7951620 |
Water-barrier encapsulation method |
Tae Kyung Won, Jose Manuel Dieguez Campo |
2011-05-31 |
| 7504332 |
Water-barrier performance of an encapsulating film |
Tae Kyung Won |
2009-03-17 |
| 7214600 |
Method to improve transmittance of an encapsulating film |
Tae Kyung Won |
2007-05-08 |
| 7183197 |
Water-barrier performance of an encapsulating film |
Tae Kyung Won |
2007-02-27 |
| 7031600 |
Method and apparatus for silicon oxide deposition on large area substrates |
Quanyuan Shang, Wendell T. Blonigan |
2006-04-18 |
| 6981508 |
On-site cleaning gas generation for process chamber cleaning |
Quanyuan Shang, William Harshbarger, Kam S. Law |
2006-01-03 |
| 6960263 |
Shadow frame with cross beam for semiconductor equipment |
Sakae Tanaka, Qunhua Wang, Quanyuan Shang, William Harshbarger |
2005-11-01 |
| 6896929 |
Susceptor shaft vacuum pumping |
Quanyuan Shang, Ernst Keller, Wei-Line Chang |
2005-05-24 |
| 6857387 |
Multiple frequency plasma chamber with grounding capacitor at cathode |
Sheng Sun, Jeff Olsen, Quanyuan Shang, Kam S. Law |
2005-02-22 |
| 6843258 |
On-site cleaning gas generation for process chamber cleaning |
Quanyuan Shang, William Harshbarger, Kam S. Law |
2005-01-18 |
| 6825134 |
Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow |
Kam S. Law, Quanyuan Shang, William Harshbarger, Dan Maydan, Soo Young Choi +2 more |
2004-11-30 |
