Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8899082 | Closing device | — | 2014-12-02 |
| 8695387 | Closing device | — | 2014-04-15 |
| 8075690 | Diffuser gravity support | John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2011-12-13 |
| 8062717 | RF current return path for a large area substrate plasma reactor | Wendell T. Blonigan, Carl A. Sorensen | 2011-11-22 |
| 7776178 | Suspension for showerhead in process chamber | — | 2010-08-17 |
| 7641762 | Gas sealing skirt for suspended showerhead in process chamber | — | 2010-01-05 |
| 7591160 | Electromechanical lock cylinder | — | 2009-09-22 |
| D588438 | Cap for a security key | — | 2009-03-17 |
| 7484473 | Suspended gas distribution manifold for plasma chamber | Quanyuan Shang | 2009-02-03 |
| 7429410 | Diffuser gravity support | John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2008-09-30 |
| D543090 | Combined security key and cap | Urs Oechslin, Bruno Vonlanthen, Urs Späni | 2007-05-22 |
| 7181937 | Locking cylinder | — | 2007-02-27 |
| 7083702 | RF current return path for a large area substrate plasma reactor | Wendell T. Blonigan, Carl A. Sorensen | 2006-08-01 |
| 7059160 | Rotary locking cylinder for a safety lock | — | 2006-06-13 |
| 7017269 | Suspended gas distribution plate | John M. White, Wendell T. Blonigan | 2006-03-28 |
| 6973814 | Safety key and locking cylinder, and locking system with such safety keys and locking cylinders | — | 2005-12-13 |
| 6896929 | Susceptor shaft vacuum pumping | Sanjay Yadav, Quanyuan Shang, Wei-Line Chang | 2005-05-24 |
| 6823589 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Wendell T. Blonigan | 2004-11-30 |
| 6772827 | Suspended gas distribution manifold for plasma chamber | Quanyuan Shang | 2004-08-10 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6532781 | Built-in safety device and key for a safety lock | — | 2003-03-18 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Shinichi Kurita, Wendell T. Blonigan +1 more | 2003-02-11 |
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Wendell T. Blonigan | 2002-11-12 |
| 5966971 | Lock bolt | — | 1999-10-19 |
| 5934119 | Spring-loaded retainer in a twist lock barrel for a safety lock | — | 1999-08-10 |