| 8899082 |
Closing device |
— |
2014-12-02 |
|
| 8695387 |
Closing device |
— |
2014-04-15 |
|
| 8075690 |
Diffuser gravity support |
John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more |
2011-12-13 |
$5,494,000 |
| 8062717 |
RF current return path for a large area substrate plasma reactor |
Wendell T. Blonigan, Carl A. Sorensen |
2011-11-22 |
$8,445,000 |
| 7776178 |
Suspension for showerhead in process chamber |
— |
2010-08-17 |
$3,871,000 |
| 7641762 |
Gas sealing skirt for suspended showerhead in process chamber |
— |
2010-01-05 |
$23,823,000 |
| 7591160 |
Electromechanical lock cylinder |
— |
2009-09-22 |
|
| D588438 |
Cap for a security key |
— |
2009-03-17 |
|
| 7484473 |
Suspended gas distribution manifold for plasma chamber |
Quanyuan Shang |
2009-02-03 |
$43,350,000 |
| 7429410 |
Diffuser gravity support |
John M. White, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more |
2008-09-30 |
$10,282,000 |
| D543090 |
Combined security key and cap |
Urs Oechslin, Bruno Vonlanthen, Urs Späni |
2007-05-22 |
|
| 7181937 |
Locking cylinder |
— |
2007-02-27 |
|
| 7083702 |
RF current return path for a large area substrate plasma reactor |
Wendell T. Blonigan, Carl A. Sorensen |
2006-08-01 |
$34,382,000 |
| 7059160 |
Rotary locking cylinder for a safety lock |
— |
2006-06-13 |
|
| 7017269 |
Suspended gas distribution plate |
John M. White, Wendell T. Blonigan |
2006-03-28 |
$21,502,000 |
| 6973814 |
Safety key and locking cylinder, and locking system with such safety keys and locking cylinders |
— |
2005-12-13 |
|
| 6896929 |
Susceptor shaft vacuum pumping |
Sanjay Yadav, Quanyuan Shang, Wei-Line Chang |
2005-05-24 |
$9,995,000 |
| 6823589 |
Flexibly suspended gas distribution manifold for plasma chamber |
John M. White, Wendell T. Blonigan |
2004-11-30 |
$15,899,000 |
| 6772827 |
Suspended gas distribution manifold for plasma chamber |
Quanyuan Shang |
2004-08-10 |
$32,377,000 |
| 6746198 |
Substrate transfer shuttle |
John M. White, Norman L. Turner, Robin L. Tiner, Shinichi Kurita, Wendell T. Blonigan +1 more |
2004-06-08 |
$49,514,000 |
| 6532781 |
Built-in safety device and key for a safety lock |
— |
2003-03-18 |
|
| 6517303 |
Substrate transfer shuttle |
John M. White, Norman L. Turner, Robin L. Tiner, Shinichi Kurita, Wendell T. Blonigan +1 more |
2003-02-11 |
|
| 6477980 |
Flexibly suspended gas distribution manifold for plasma chamber |
John M. White, Wendell T. Blonigan |
2002-11-12 |
$68,025,000 |
| 5966971 |
Lock bolt |
— |
1999-10-19 |
|
| 5934119 |
Spring-loaded retainer in a twist lock barrel for a safety lock |
— |
1999-08-10 |
|
