Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897943 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2011-03-01 |
| 7888660 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2011-02-15 |
| 7829866 | Broad energy-range ribbon ion beam collimation using a variable-gradient dipole | Kenneth H. Purser | 2010-11-09 |
| 7439526 | Beam neutralization in low-energy high-current ribbon-beam implanters | Kenneth H. Purser | 2008-10-21 |
| 7414249 | Broad energy-range ribbon ion beam collimation using a variable-gradient dipole | Kenneth H. Purser | 2008-08-19 |
| 7365340 | Resonance method for production of intense low-impurity ion beams of atoms and molecules | Kenneth H. Purser, Albert E. Litherland | 2008-04-29 |
| 7351984 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2008-04-01 |
| 7301156 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2007-11-27 |
| 6933507 | Controlling the characteristics of implanter ion-beams | Kenneth H. Purser, Harald A. Enge | 2005-08-23 |
| 6881305 | Heated and cooled vacuum chamber shield | Russell Weldon Black, Ernest Demaray | 2005-04-19 |
| 6746198 | Substrate transfer shuttle | John M. White, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2004-06-08 |
| 6688375 | Vacuum processing system having improved substrate heating and cooling | John M. White, Alan D'Entremont | 2004-02-10 |
| 6517303 | Substrate transfer shuttle | John M. White, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2003-02-11 |
| 6432203 | Heated and cooled vacuum chamber shield | Russell Weldon Black, Ernest Demaray | 2002-08-13 |
| 6235634 | Modular substrate processing system | John M. White, Robert B. Conner, Jr., Kam S. Law, William T. Lee, Shinichi Kurita | 2001-05-22 |
| 5753133 | Method and apparatus for etching film layers on large substrates | Jerry Wong, Masato Toshima, Kam S. Law, Dan Maydan | 1998-05-19 |
| 5674786 | Method of heating and cooling large area glass substrates | John M. White, David E. Berkstresser | 1997-10-07 |
| 5607009 | Method of heating and cooling large area substrates and apparatus therefor | John M. White, David E. Berkstresser | 1997-03-04 |
| 5512320 | Vacuum processing apparatus having improved throughput | John M. White | 1996-04-30 |
| 5509464 | Method and apparatus for cooling rectangular substrates | John M. White, Alfred Mak | 1996-04-23 |
| 5447570 | Purge gas in wafer coating area selection | Johannes Schmitz, Frederick J. Scholz, Raymond L. Chow, Frank O. Uher, Sien G. Kang +1 more | 1995-09-05 |
| 4775796 | Treating workpieces with beams | Kenneth H. Purser | 1988-10-04 |
| 4745287 | Ion implantation with variable implant angle | — | 1988-05-17 |
| 4717829 | Platen and beam setup flag assembly for ion implanter | — | 1988-01-05 |
| 4680474 | Method and apparatus for improved ion dose accuracy | John D. Pollock | 1987-07-14 |