Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4567938 | Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system | — | 1986-02-04 |
| 4535834 | Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system | — | 1985-08-20 |
| 4475045 | Rapid pumpdown for high vacuum processing | Scott C. Holden | 1984-10-02 |
| 4463255 | Apparatus for enhanced neutralization of positively charged ion beam | David A. Robertson | 1984-07-31 |
| 4433247 | Beam sharing method and apparatus for ion implantation | — | 1984-02-21 |
| 4421988 | Beam scanning method and apparatus for ion implantation | David A. Robertson | 1983-12-20 |
| 4412153 | Dual filament ion source | Charles R. Kalbfus | 1983-10-25 |
| 4383180 | Particle beam accelerator | — | 1983-05-10 |
| 4367411 | Unitary electromagnet for double deflection scanning of charged particle beam | Peter R. Hanley | 1983-01-04 |
| 4283631 | Bean scanning and method of use for ion implantation | — | 1981-08-11 |