| 12240143 |
Rapid ceramic processing techniques and equipment |
Timothy P. Holme, Martin M. Winterkorn, John Olenick, Matthew SHEFFIELD, Yamini Mohan +2 more |
2025-03-04 |
|
| 12090684 |
Rapid ceramic processing techniques and equipment |
Timothy P. Holme, Martin M. Winterkorn, John Olenick, Matthew SHEFFIELD, Yamini Mohan +2 more |
2024-09-17 |
|
| 11777153 |
Thermal and electrical management of battery packs |
Weston Arthur Hermann, Stuart D. Barter, Phillip John Weicker |
2023-10-03 |
|
| 11011783 |
Thermal and electrical management of battery packs |
Weston Arthur Hermann, Stuart D. Barter, Phillip John Weicker |
2021-05-18 |
|
| 10158115 |
Flash evaporation of solid state battery component |
Bradley O. Stimson, Weston Arthur Hermann, Tim Holme, Arnold Allenic |
2018-12-18 |
|
| 9580956 |
Methods and apparatus for providing a floating seal for chamber doors |
Billy C. Leung, Shinichi Kurita |
2017-02-28 |
$9,499,000 |
| 9462921 |
Broken wafer recovery system |
Craig L. Stevens, Wendell T. Blonigan |
2016-10-11 |
|
| 9287152 |
Auto-sequencing multi-directional inline processing method |
Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens |
2016-03-15 |
|
| 8672603 |
Auto-sequencing inline processing apparatus |
Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens |
2014-03-18 |
|
| 8648977 |
Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors |
Billy C. Leung, Shinichi Kurita |
2014-02-11 |
$13,314,000 |
| 8459276 |
Broken wafer recovery system |
Craig L. Stevens, Wendell T. Blonigan |
2013-06-11 |
|
| 8444364 |
Auto-sequencing multi-directional inline processing apparatus |
Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens |
2013-05-21 |
|
| 7775853 |
Configurable polishing apparatus |
In-Kwon Jeong |
2010-08-17 |
|
| 7575220 |
Curved slit valve door |
Yoshiaki Tanase, Billy C. Leung, Gregory Stephen Lewis |
2009-08-18 |
$17,494,000 |
| 7497414 |
Curved slit valve door with flexible coupling |
Jae-Chull Lee |
2009-03-03 |
$11,197,000 |
| 7364496 |
Polishing head for polishing semiconductor wafers |
Jerry J. Berkstresser, Jino Park, In-Kwon Jeong |
2008-04-29 |
|
| 6835118 |
Rigid plate assembly with polishing pad and method of using |
In-Kwon Jeong |
2004-12-28 |
|
| 6746198 |
Substrate transfer shuttle |
John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more |
2004-06-08 |
$49,514,000 |
| 6517303 |
Substrate transfer shuttle |
John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more |
2003-02-11 |
|
| 5676803 |
Sputtering device |
Richard E. Demaray, Manuel J. Herrera |
1997-10-14 |
|
| 5674786 |
Method of heating and cooling large area glass substrates |
Norman L. Turner, John M. White |
1997-10-07 |
$76,790,000 |
| 5611865 |
Alignment of a shadow frame and large flat substrates on a heated support |
John M. White, Carl T. Petersen |
1997-03-18 |
$51,702,000 |
| 5607009 |
Method of heating and cooling large area substrates and apparatus therefor |
Norman L. Turner, John M. White |
1997-03-04 |
$23,013,000 |
| 5603816 |
Sputtering device and target with cover to hold cooling fluid |
Richard E. Demaray, Manuel J. Herrera |
1997-02-18 |
$121,367,000 |
| 5595337 |
Sputtering device and target with cover to hold cooling fluid |
Richard E. Demaray, Manuel J. Herrera |
1997-01-21 |
$104,754,000 |
