Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240143 | Rapid ceramic processing techniques and equipment | Timothy P. Holme, Martin M. Winterkorn, John Olenick, Matthew SHEFFIELD, Yamini Mohan +2 more | 2025-03-04 |
| 12090684 | Rapid ceramic processing techniques and equipment | Timothy P. Holme, Martin M. Winterkorn, John Olenick, Matthew SHEFFIELD, Yamini Mohan +2 more | 2024-09-17 |
| 11777153 | Thermal and electrical management of battery packs | Weston Arthur Hermann, Stuart D. Barter, Phillip John Weicker | 2023-10-03 |
| 11011783 | Thermal and electrical management of battery packs | Weston Arthur Hermann, Stuart D. Barter, Phillip John Weicker | 2021-05-18 |
| 10158115 | Flash evaporation of solid state battery component | Bradley O. Stimson, Weston Arthur Hermann, Tim Holme, Arnold Allenic | 2018-12-18 |
| 9580956 | Methods and apparatus for providing a floating seal for chamber doors | Billy C. Leung, Shinichi Kurita | 2017-02-28 |
| 9462921 | Broken wafer recovery system | Craig L. Stevens, Wendell T. Blonigan | 2016-10-11 |
| 9287152 | Auto-sequencing multi-directional inline processing method | Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens | 2016-03-15 |
| 8672603 | Auto-sequencing inline processing apparatus | Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens | 2014-03-18 |
| 8648977 | Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors | Billy C. Leung, Shinichi Kurita | 2014-02-11 |
| 8459276 | Broken wafer recovery system | Craig L. Stevens, Wendell T. Blonigan | 2013-06-11 |
| 8444364 | Auto-sequencing multi-directional inline processing apparatus | Wendell T. Blonigan, Masato Toshima, Kam S. Law, Steve Kleinke, Craig L. Stevens | 2013-05-21 |
| 7775853 | Configurable polishing apparatus | In-Kwon Jeong | 2010-08-17 |
| 7575220 | Curved slit valve door | Yoshiaki Tanase, Billy C. Leung, Gregory Stephen Lewis | 2009-08-18 |
| 7497414 | Curved slit valve door with flexible coupling | Jae-Chull Lee | 2009-03-03 |
| 7364496 | Polishing head for polishing semiconductor wafers | Jerry J. Berkstresser, Jino Park, In-Kwon Jeong | 2008-04-29 |
| 6835118 | Rigid plate assembly with polishing pad and method of using | In-Kwon Jeong | 2004-12-28 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2004-06-08 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2003-02-11 |
| 5676803 | Sputtering device | Richard E. Demaray, Manuel J. Herrera | 1997-10-14 |
| 5674786 | Method of heating and cooling large area glass substrates | Norman L. Turner, John M. White | 1997-10-07 |
| 5611865 | Alignment of a shadow frame and large flat substrates on a heated support | John M. White, Carl T. Petersen | 1997-03-18 |
| 5607009 | Method of heating and cooling large area substrates and apparatus therefor | Norman L. Turner, John M. White | 1997-03-04 |
| 5603816 | Sputtering device and target with cover to hold cooling fluid | Richard E. Demaray, Manuel J. Herrera | 1997-02-18 |
| 5595337 | Sputtering device and target with cover to hold cooling fluid | Richard E. Demaray, Manuel J. Herrera | 1997-01-21 |