Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8124907 | Load lock chamber with decoupled slit valve door seal compartment | Suhail Anwar, Shinichi Kurita | 2012-02-28 |
| 8061949 | Multiple slot load lock chamber and method of operation | Shinichi Kurita, Suhail Anwar | 2011-11-22 |
| 7845618 | Valve door with ball coupling | Sam Kim, William N. Sterling, Paul J. Brown | 2010-12-07 |
| 7845891 | Decoupled chamber body | Shinichi Kurita, John M. White, Suhail Anwar | 2010-12-07 |
| 7822324 | Load lock chamber with heater in tube | Suhail Anwar, Shinichi Kurita | 2010-10-26 |
| 7665951 | Multiple slot load lock chamber and method of operation | Shinichi Kurita, Suhail Anwar | 2010-02-23 |
| 7497414 | Curved slit valve door with flexible coupling | David E. Berkstresser | 2009-03-03 |