Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347644 | Susceptor assembly for plasma apparatus | Koji Tanaka | 2025-07-01 |
| 12270106 | Substrate retaining apparatus, system including the apparatus, and method of using same | Shiva K.T. Rajavelu Muralidhar, Jeffrey Barrett Robinson, James Wilson, Ninad Vijay Sonje | 2025-04-08 |
| 12209663 | Sealing member with lip seal | Yao-Hung YANG, Chih-Yang Chang | 2025-01-28 |
| 11961756 | Vented susceptor | Uday Kiran Rokkam, Saket Rathi, Dakai Bian | 2024-04-16 |
| 11946137 | Runout and wobble measurement fixtures | Aniket PATIL, Saket Rathi, Shiva K.T. Rajavelu Muralidhar | 2024-04-02 |
| 11885023 | Substrate retaining apparatus, system including the apparatus, and method of using same | Shiva K.T. Rajavelu Muralidhar, Jeffrey Barrett Robinson, James Wilson, Ninad Vijay Sonje | 2024-01-30 |
| 11842908 | Semiconductor processing chamber with filament lamps having nonuniform heat output | Shiva K.T. Rajavelu Muralidhar | 2023-12-12 |
| 11837494 | Substrate handling device with adjustable joints | Kihyun Kim, Rutvij Naik | 2023-12-05 |
| 11828707 | Method and apparatus for transmittance measurements of large articles | Shiva K.T. Rajavelu Muralidhar, Youness Alvandi-Tabrizi, John DiSanto | 2023-11-28 |
| D975665 | Susceptor shaft | Aniket PATIL | 2023-01-17 |
| 11488854 | Substrate handling device with adjustable joints | Kihyun Kim, Rutvij Naik | 2022-11-01 |
| D965524 | Susceptor support | Aniket PATIL, John DiSanto, Saket Rathi | 2022-10-04 |
| D965044 | Susceptor shaft | Aniket PATIL, John DiSanto, Saket Rathi | 2022-09-27 |
| D958764 | Higher temperature vented susceptor | Uday Kiran Rokkam, Saket Rathi, Dakai Bian | 2022-07-26 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen | 2022-04-05 |
| D947913 | Susceptor shaft | Aniket PATIL | 2022-04-05 |
| D920936 | Higher temperature vented susceptor | Uday Kiran Rokkam, Saket Rathi, Dakai Bian | 2021-06-01 |
| D914620 | Vented susceptor | Uday Kiran Rokkam, Saket Rathi, Dakai Bian | 2021-03-30 |
| 10669629 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen | 2020-06-02 |
| 10233543 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen | 2019-03-19 |
| 9966274 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Gon-jun Kim, Sangheon Lee | 2018-05-08 |
| 9685346 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Gon-jun Kim, Sangheon Lee | 2017-06-20 |
| 9039864 | Off-center ground return for RF-powered showerhead | Jonghoon Baek, Beom Soo Park | 2015-05-26 |
| 8875657 | Balancing RF bridge assembly | Jonghoon Baek, Beom Soo Park | 2014-11-04 |
| 8853098 | Substrate support with gas introduction openings | John M. White, Soo Young Choi, Carl A. Sorensen, Robin L. Tiner, Beom Soo Park | 2014-10-07 |