Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8430961 | Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber | Beom Soo Park, Young Jin Choi, Robin L. Tiner, Soo Young Choi, John M. White +1 more | 2013-04-30 |
| 7845618 | Valve door with ball coupling | Jae-Chull Lee, William N. Sterling, Paul J. Brown | 2010-12-07 |
| 7007919 | Slit valve method and apparatus | Wendell T. Blonigan, Emanuel Beer, Dongchoon Suh, Jaime Munoz | 2006-03-07 |
| 6825447 | Apparatus and method for uniform substrate heating and contaminate collection | Akihiro Hosokawa, Dong Choon Suh | 2004-11-30 |
| 5007145 | End-locking device for slide fasteners | — | 1991-04-16 |
| 4958481 | Box-cording apparatus | — | 1990-09-25 |