Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8327878 | Chamber isolation valve RF grounding | Ke Ling Lee, Shinichi Kurita | 2012-12-11 |
| 8033772 | Transfer chamber for vacuum processing system | Shinichi Kurita, Hung T. Nguyen, Wendell T. Blonigan | 2011-10-11 |
| 7919972 | Integrated substrate transfer module | Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud | 2011-04-05 |
| 7847566 | Configurable prober for TFT LCD array test | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin M. Johnston +1 more | 2010-12-07 |
| 7499767 | Methods and apparatus for positioning a substrate relative to a support stage | Shinichi Kurita | 2009-03-03 |
| 7469715 | Chamber isolation valve RF grounding | Ke Ling Lee, Shinichi Kurita | 2008-12-30 |
| 7372250 | Methods and apparatus for determining a position of a substrate relative to a support stage | Shinichi Kurita, Edgar Kehrberg, Matthias Brunner | 2008-05-13 |
| 7355418 | Configurable prober for TFT LCD array test | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez E. Abboud, Benjamin M. Johnston +1 more | 2008-04-08 |
| 7330021 | Integrated substrate transfer module | Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud | 2008-02-12 |
| 7319335 | Configurable prober for TFT LCD array testing | Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin M. Johnston +1 more | 2008-01-15 |
| 7208047 | Apparatus and method for thermally isolating a heat chamber | Kenneth Baumel | 2007-04-24 |
| 7151981 | Methods and apparatus for positioning a substrate relative to a support stage | Shinichi Kurita | 2006-12-19 |
| 7018517 | Transfer chamber for vacuum processing system | Shinichi Kurita, Hung T. Nguyen, Wendell T. Blonigan | 2006-03-28 |
| 7007919 | Slit valve method and apparatus | Wendell T. Blonigan, Dongchoon Suh, Jaime Munoz, Sam Kim | 2006-03-07 |
| 6897411 | Heated substrate support | Makoto Inagawa | 2005-05-24 |
| 6847730 | Automated substrate processing system | John M. White | 2005-01-25 |
| 6833717 | Electron beam test system with integrated substrate transfer module | Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston | 2004-12-21 |
| 6647993 | Surface-treated shower head for use in a substrate processing chamber | Quanyuan Shang, Sheng Sun, Kam S. Law | 2003-11-18 |
| 6554907 | Susceptor with internal support | Robin L. Tiner | 2003-04-29 |
| 6371712 | Support frame for substrates | John M. White, Larry Chang | 2002-04-16 |
| 6225601 | Heating a substrate support in a substrate handling chamber | Duoyan Shen, Eitan Zohar, Marc M. Kollrack | 2001-05-01 |
| 6215897 | Automated substrate processing system | John M. White | 2001-04-10 |
| 6182603 | Surface-treated shower head for use in a substrate processing chamber | Quanyuan Shang, Sheng Sun, Kam S. Law | 2001-02-06 |
| 6149365 | Support frame for substrates | John M. White, Larry Chang | 2000-11-21 |