| 8327878 |
Chamber isolation valve RF grounding |
Ke Ling Lee, Shinichi Kurita |
2012-12-11 |
| 8033772 |
Transfer chamber for vacuum processing system |
Shinichi Kurita, Hung T. Nguyen, Wendell T. Blonigan |
2011-10-11 |
| 7919972 |
Integrated substrate transfer module |
Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud |
2011-04-05 |
| 7847566 |
Configurable prober for TFT LCD array test |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin M. Johnston +1 more |
2010-12-07 |
| 7499767 |
Methods and apparatus for positioning a substrate relative to a support stage |
Shinichi Kurita |
2009-03-03 |
| 7469715 |
Chamber isolation valve RF grounding |
Ke Ling Lee, Shinichi Kurita |
2008-12-30 |
| 7372250 |
Methods and apparatus for determining a position of a substrate relative to a support stage |
Shinichi Kurita, Edgar Kehrberg, Matthias Brunner |
2008-05-13 |
| 7355418 |
Configurable prober for TFT LCD array test |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez E. Abboud, Benjamin M. Johnston +1 more |
2008-04-08 |
| 7330021 |
Integrated substrate transfer module |
Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston, Fayez E. Abboud |
2008-02-12 |
| 7319335 |
Configurable prober for TFT LCD array testing |
Matthias Brunner, Shinichi Kurita, Ralf Schmid, Fayez (Frank) E. Abboud, Benjamin M. Johnston +1 more |
2008-01-15 |
| 7208047 |
Apparatus and method for thermally isolating a heat chamber |
Kenneth Baumel |
2007-04-24 |
| 7151981 |
Methods and apparatus for positioning a substrate relative to a support stage |
Shinichi Kurita |
2006-12-19 |
| 7018517 |
Transfer chamber for vacuum processing system |
Shinichi Kurita, Hung T. Nguyen, Wendell T. Blonigan |
2006-03-28 |
| 7007919 |
Slit valve method and apparatus |
Wendell T. Blonigan, Dongchoon Suh, Jaime Munoz, Sam Kim |
2006-03-07 |
| 6897411 |
Heated substrate support |
Makoto Inagawa |
2005-05-24 |
| 6847730 |
Automated substrate processing system |
John M. White |
2005-01-25 |
| 6833717 |
Electron beam test system with integrated substrate transfer module |
Shinichi Kurita, Hung T. Nguyen, Benjamin M. Johnston |
2004-12-21 |
| 6647993 |
Surface-treated shower head for use in a substrate processing chamber |
Quanyuan Shang, Sheng Sun, Kam S. Law |
2003-11-18 |
| 6554907 |
Susceptor with internal support |
Robin L. Tiner |
2003-04-29 |
| 6371712 |
Support frame for substrates |
John M. White, Larry Chang |
2002-04-16 |
| 6225601 |
Heating a substrate support in a substrate handling chamber |
Duoyan Shen, Eitan Zohar, Marc M. Kollrack |
2001-05-01 |
| 6215897 |
Automated substrate processing system |
John M. White |
2001-04-10 |
| 6182603 |
Surface-treated shower head for use in a substrate processing chamber |
Quanyuan Shang, Sheng Sun, Kam S. Law |
2001-02-06 |
| 6149365 |
Support frame for substrates |
John M. White, Larry Chang |
2000-11-21 |
