{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Automated substrate processing system", "item": "https://www.patentleaderboard.com/patent/6847730"}]}
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Automated substrate processing system

US Patent 6847730 · Granted Jan 25, 2005

Estimated economic value: $27,919,000 ⓘ

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