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Home › Electron beam test system with integrated substrate transfer module

Electron beam test system with integrated substrate transfer module

US Patent 6833717 · Granted Dec 21, 2004

Estimated economic value: $24,351,000 ⓘ

Assignee

Applied Materials

Inventors

Shinichi Kurita (132 patents)
Emanuel Beer (24 patents)
Hung T. Nguyen (14 patents)
Benjamin M. Johnston (22 patents)

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