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Home › Film stress control for plasma enhanced chemical vapor deposition

Film stress control for plasma enhanced chemical vapor deposition

US Patent 11854771 · Granted Dec 26, 2023

Estimated economic value: $30,871,000 ⓘ

Assignee

Applied Materials

Inventors

Chien-Teh Kao (51 patents)
Tae Kyung Won (54 patents)
Carl A. Sorensen (62 patents)
Sanjay Yadav (23 patents)
Young Dong LEE (14 patents)
Shinichi Kurita (132 patents)
Soo Young Choi (176 patents)

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