| 11450525 |
Selective aluminum oxide film deposition |
Liqi Wu, Bhaskar Jyoti Bhuyan, Mark Saly, Feng Q. Liu, David Thompson |
2022-09-20 |
| 8033772 |
Transfer chamber for vacuum processing system |
Shinichi Kurita, Emanuel Beer, Wendell T. Blonigan |
2011-10-11 |
| 7973546 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Matthias Brunner, Ralf Schmid +3 more |
2011-07-05 |
| 7919972 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Benjamin M. Johnston, Fayez E. Abboud |
2011-04-05 |
| 7786742 |
Prober for electronic device testing on large area substrates |
Sriram Krishnaswami, Matthias Brunner, William Beaton, Yong Liu, Benjamin M. Johnston +2 more |
2010-08-31 |
| 7746088 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Matthias Brunner, Ralf Schmid +3 more |
2010-06-29 |
| 7735710 |
Substrate support |
Shinichi Kurita, Wendell T. Blonigan, Suhail Anwar, Toshio Kiyotake |
2010-06-15 |
| 7602199 |
Mini-prober for TFT-LCD testing |
Benjamin M. Johnston, Sriram Krishnaswami, Matthias Brunner, Yong Liu |
2009-10-13 |
| 7535238 |
In-line electron beam test system |
Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Matthias Brunner, Ralf Schmid +3 more |
2009-05-19 |
| 7505832 |
Method and apparatus for determining a substrate exchange position in a processing system |
Dongchoon Suh, Akihiro Hosokawa |
2009-03-17 |
| 7330021 |
Integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Benjamin M. Johnston, Fayez E. Abboud |
2008-02-12 |
| 7018517 |
Transfer chamber for vacuum processing system |
Shinichi Kurita, Emanuel Beer, Wendell T. Blonigan |
2006-03-28 |
| 6833717 |
Electron beam test system with integrated substrate transfer module |
Shinichi Kurita, Emanuel Beer, Benjamin M. Johnston |
2004-12-21 |
| 6824343 |
Substrate support |
Shinichi Kurita, Wendell T. Blonigan, Suhail Anwar, Toshio Kiyotake |
2004-11-30 |
