Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8216422 | Substrate support bushing | Shinichi Kurita, Suhail Anwar | 2012-07-10 |
| 8033245 | Substrate support bushing | Shinichi Kurita, Suhail Anwar | 2011-10-11 |
| 7834994 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Takayuki Matsumoto +4 more | 2010-11-16 |
| 7735710 | Substrate support | Shinichi Kurita, Wendell T. Blonigan, Suhail Anwar, Hung T. Nguyen | 2010-06-15 |
| 7440091 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Takayuki Matsumoto +4 more | 2008-10-21 |
| 6824343 | Substrate support | Shinichi Kurita, Wendell T. Blonigan, Suhail Anwar, Hung T. Nguyen | 2004-11-30 |