| 12347644 |
Susceptor assembly for plasma apparatus |
Koji Tanaka |
2025-07-01 |
|
| 12270106 |
Substrate retaining apparatus, system including the apparatus, and method of using same |
Shiva K.T. Rajavelu Muralidhar, Jeffrey Barrett Robinson, James Wilson, Ninad Vijay Sonje |
2025-04-08 |
|
| 12209663 |
Sealing member with lip seal |
Yao-Hung YANG, Chih-Yang Chang |
2025-01-28 |
|
| 11961756 |
Vented susceptor |
Uday Kiran Rokkam, Saket Rathi, Dakai Bian |
2024-04-16 |
|
| 11946137 |
Runout and wobble measurement fixtures |
Aniket PATIL, Saket Rathi, Shiva K.T. Rajavelu Muralidhar |
2024-04-02 |
|
| 11885023 |
Substrate retaining apparatus, system including the apparatus, and method of using same |
Shiva K.T. Rajavelu Muralidhar, Jeffrey Barrett Robinson, James Wilson, Ninad Vijay Sonje |
2024-01-30 |
|
| 11842908 |
Semiconductor processing chamber with filament lamps having nonuniform heat output |
Shiva K.T. Rajavelu Muralidhar |
2023-12-12 |
|
| 11837494 |
Substrate handling device with adjustable joints |
Kihyun Kim, Rutvij Naik |
2023-12-05 |
|
| 11828707 |
Method and apparatus for transmittance measurements of large articles |
Shiva K.T. Rajavelu Muralidhar, Youness Alvandi-Tabrizi, John DiSanto |
2023-11-28 |
|
| D975665 |
Susceptor shaft |
Aniket PATIL |
2023-01-17 |
|
| 11488854 |
Substrate handling device with adjustable joints |
Kihyun Kim, Rutvij Naik |
2022-11-01 |
|
| D965524 |
Susceptor support |
Aniket PATIL, John DiSanto, Saket Rathi |
2022-10-04 |
|
| D965044 |
Susceptor shaft |
Aniket PATIL, John DiSanto, Saket Rathi |
2022-09-27 |
|
| D958764 |
Higher temperature vented susceptor |
Uday Kiran Rokkam, Saket Rathi, Dakai Bian |
2022-07-26 |
|
| 11293099 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen |
2022-04-05 |
$91,536,000 |
| D947913 |
Susceptor shaft |
Aniket PATIL |
2022-04-05 |
|
| D920936 |
Higher temperature vented susceptor |
Uday Kiran Rokkam, Saket Rathi, Dakai Bian |
2021-06-01 |
|
| D914620 |
Vented susceptor |
Uday Kiran Rokkam, Saket Rathi, Dakai Bian |
2021-03-30 |
|
| 10669629 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen |
2020-06-02 |
$65,790,000 |
| 10233543 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tuan Nguyen |
2019-03-19 |
$17,059,000 |
| 9966274 |
Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method |
Gon-jun Kim, Sangheon Lee |
2018-05-08 |
|
| 9685346 |
Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method |
Gon-jun Kim, Sangheon Lee |
2017-06-20 |
|
| 9039864 |
Off-center ground return for RF-powered showerhead |
Jonghoon Baek, Beom Soo Park |
2015-05-26 |
$17,022,000 |
| 8875657 |
Balancing RF bridge assembly |
Jonghoon Baek, Beom Soo Park |
2014-11-04 |
$12,728,000 |
| 8853098 |
Substrate support with gas introduction openings |
John M. White, Soo Young Choi, Carl A. Sorensen, Robin L. Tiner, Beom Soo Park |
2014-10-07 |
$14,828,000 |
