Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569065 | Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device | Sung-gil KANG, Min Seop Park, Jae-Jik Baek, Jae-Jin Shin, In-hye JEONG | 2023-01-31 |
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Yuri Barsukov, Vladimir Volynets, Dali Liu, Sang Jin An, Beom Jin Yoo +2 more | 2019-09-17 |
| 9966274 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Sam Kim, Sangheon Lee | 2018-05-08 |
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sangheon Lee, Sung-keun Cho +2 more | 2018-01-09 |
| 9685346 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Sam Kim, Sangheon Lee | 2017-06-20 |
| 9105581 | Method of processing a substrate and apparatus for performing the same | Sam Kim, Volynets Vladmir, Yong-Kyun Park, In-Cheol Song, Sang Heon Lee +1 more | 2015-08-11 |