Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865474 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Vladimir Volynets, Sang Jin An, Sangheon Lee, Sung-keun Cho +2 more | 2018-01-09 |
| 9520301 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Go-jun Kim, Vladimir Volynets, Sang Jin An, Sang Heon Lee, Sung-keun Cho +2 more | 2016-12-13 |
| 8404080 | Apparatus to treat a substrate | Sang Jean Jeon, Jong Rok Park, Sung-yeup Sa, Guen Suk Lee | 2013-03-26 |