Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520301 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Vladimir Volynets, Sang Jin An, Hee-jeon Yang, Sang Heon Lee, Sung-keun Cho +2 more | 2016-12-13 |