Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564286 | Method of forming thin film of semiconductor device | Andrei Iancu, Friedrich B. Prinz, Michael C. Langston, Peter Schindler, Ki Hyun Kim +2 more | 2017-02-07 |
| 9105581 | Method of processing a substrate and apparatus for performing the same | Gon-jun Kim, Volynets Vladmir, Yong-Kyun Park, In-Cheol Song, Sang Heon Lee +1 more | 2015-08-11 |