Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569065 | Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device | Sung-gil KANG, Gon-jun Kim, Jae-Jik Baek, Jae-Jin Shin, In-hye JEONG | 2023-01-31 |
| 8964173 | Maskless exposure apparatus and spot beam position measurement method using the same | Sung Min Ahn | 2015-02-24 |