Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12430526 | Method and system for scanning a code on a transparent part | Chih-Yang Chang, Shannon WANG | 2025-09-30 |
| 12431338 | Composite structures for semiconductor process chambers | Tianshu LI, Yikai Chen, Aniruddha Pal, Saurabh M. Chaudhari | 2025-09-30 |
| 12412774 | Tab arrangement for retaining support elements of substrate support | Fred Eric Ruhland, Pavankumar Ramanand HARAPANHALLI, Gaurav Shrivastava | 2025-09-09 |
| 12362211 | Detecting defects of semiconductor manufacturing assemblies | Chih-Yang Chang, Shannon WANG | 2025-07-15 |
| 12337415 | Method and apparatus for laser texturing a component | Chih-Yang Chang, Shannon WANG, Jianqi Wang | 2025-06-24 |
| 12209663 | Sealing member with lip seal | Chih-Yang Chang, Sam Kim | 2025-01-28 |
| 12148607 | High power tungsten halogen lamp lifetime improvement through J-hook design | Shantanu Rajiv Gadgil, Kaushik RAO, Vincent Kirchhoff, Sagir Kadiwala, Munirah Mahyudin +1 more | 2024-11-19 |
| 12011731 | Faceplate tensioning method and apparatus to prevent droop | Shantanu Rajiv Gadgil, Tanmay Pramod GURJAR, Sudhir Gondhalekar | 2024-06-18 |
| D1027120 | Seal for an assembly in a vapor deposition chamber | Eric Ruhland, Saurabh M. Chaudhari, Dien-Yeh Wu, Philip Wayne Nagle, Aniruddha Pal +4 more | 2024-05-14 |
| 11881392 | High power tungsten halogen lamp lifetime improvement through J-hook design | Shantanu Rajiv Gadgil, Kaushik RAO, Vincent Kirchhoff, Sagir Kadiwala, Munirah Mahyudin +1 more | 2024-01-23 |
| 11856706 | Method and system for improving the operation of semiconductor processing | Hsui Yang, Jeevan Shanbhag, Chien-Min Liao, Earl Hunter, David Ganon +4 more | 2023-12-26 |
| 11532466 | Part-life estimation utilizing feature metrology | Chien-Min Liao, Tom K. Cho, Siamak Salimian, Hsiu Yang, Chun-Chung Chen | 2022-12-20 |
| 11359722 | Multinode multi-use O-ring and method for forming a seal | Shagun P. Maheshwari, King F. Lee, Andrew Yu, Aniruddha Pal, Tom K. Cho +1 more | 2022-06-14 |
| 11090893 | Method of reclaiming a seal | Shagun P. Maheshwari, Tom K. Cho, Yu-Chi Yeh, Andrew Yu, Aniruddha Pal +1 more | 2021-08-17 |
| 11074426 | Methods and systems for multi-part authentication and tracking | Chien-Min Liao, Hsiu Yang, Jeevan Shanbhag, Chun-Chung Chen, Tom K. Cho | 2021-07-27 |
| 9089007 | Method and apparatus for substrate support with multi-zone heating | Jeonghoon Oh, Frank Hooshdaran, Tom K. Cho, Tao Hou | 2015-07-21 |
| 8911151 | Substrate support bushing | Tao Hou, Jeonghoon Oh, Tom K. Cho, Andrzej Matlosz, Frank Hooshdaran | 2014-12-16 |
| 8338809 | Ultraviolet reflector with coolant gas holes and method | Tuan Nguyen, Sanjeev Baluja, Andrzej Kaszuba, Juan Carlos Rocha, Thomas Nowak +1 more | 2012-12-25 |
| 8309421 | Dual-bulb lamphead control methodology | Abhijit A. Kangude, Sanjeev Baluja, Michael A. Martinelli, Liliya Krivulina, Thomas Nowak +2 more | 2012-11-13 |
| 7964858 | Ultraviolet reflector with coolant gas holes and method | Tuan Nguyen, Sanjeev Baluja, Andrzej Kaszuba, Juan Carlos Rocha, Thomas Nowak +1 more | 2011-06-21 |