Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 8841629 | Microwave excursion detection for semiconductor processing | Scott A. Hendrickson, Juan Carlos Rocha, Sanjeev Baluja | 2014-09-23 |
| 8309421 | Dual-bulb lamphead control methodology | Yao-Hung YANG, Abhijit A. Kangude, Sanjeev Baluja, Michael A. Martinelli, Thomas Nowak +2 more | 2012-11-13 |