Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo +2 more | 2022-04-26 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2021-06-08 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min | 2021-03-16 |
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Jiarui Wang, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min | 2020-08-04 |
| 10679830 | Cleaning process for removing boron-carbon residuals in processing chamber at high temperature | Feng Bi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee | 2020-06-09 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2020-04-28 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Dale R. Du Bois, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more | 2019-09-03 |
| 9490154 | Method of aligning substrate-scale mask with substrate | Abraham Ravid, Todd Egan, Sergey Starik, Ganesh Balasubramanian | 2016-11-08 |
| 9355876 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Paul B. Reuter, Ganesh Balasubramanian, JuanCarlos Rocha-Alvarez, Jeffrey Barrett Robinson, Dale R. Du Bois | 2016-05-31 |