Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094796 | Nitrogen-rich silicon nitride films for thin film transistors | Rodney Shunleong Lim, Jung Bae Kim, Yi Cui, Dong-Kil Yim, Soo Young Choi | 2024-09-17 |
| 11699628 | Nitrogen-rich silicon nitride films for thin film transistors | Rodney Shunleong Lim, Jung Bae Kim, Yi Cui, Dong-Kil Yim, Soo Young Choi | 2023-07-11 |
| 11037851 | Nitrogen-rich silicon nitride films for thin film transistors | Rodney Shunleong Lim, Jung Bae Kim, Yi Cui, Dong-Kil Yim, Soo Young Choi | 2021-06-15 |
| 10950445 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2021-03-16 |
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2020-08-04 |
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Prashant Kumar Kulshreshtha, Eswaranand Venkatasubramanian, Susmit Singha Roy, Kwangduk Douglas Lee | 2019-12-10 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun CHO +1 more | 2019-11-05 |