Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211694 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Kwangduk Douglas Lee, Bok Hoen Kim | 2025-01-28 |
| 11728168 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Kwangduk Douglas Lee, Bok Hoen Kim | 2023-08-15 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10971364 | Ultra-high modulus and etch selectivity boron carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Kwangduk Douglas Lee, Bok Hoen Kim | 2021-04-06 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10599043 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Juan Carlos Rocha-Alvarez, Jeongmin Lee +4 more | 2020-03-24 |
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Kwangduk Douglas Lee, Bok Hoen Kim | 2019-09-17 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |