Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431387 | Self-assembled monolayer for selective deposition | Kevin Kashefi | 2025-09-30 |
| 12412738 | System for target arcing mapping and plasma diagnosis | Junjie PAN, Fuhong Zhang | 2025-09-09 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| 12322573 | Pulsing plasma treatment for film densification | Rui Li, Xianmin Tang, Anthony Chih-Tung Chan | 2025-06-03 |
| 12252779 | Methods for in-situ chamber monitoring | Carmen Leal Cervantes | 2025-03-18 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Tae Hong Ha, Xianmin Tang, Lu Chen | 2025-03-04 |
| 12094766 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Bhaskar Jyoti Bhuyan, Mark Saly, Drew Phillips, Aaron Dangerfield +2 more | 2024-09-17 |
| 11990319 | Methods and apparatus for processing a substrate | Yida LIN, Rui Li, Martin Lee Riker, Haitao Wang, Noufal Kappachali | 2024-05-21 |
| D1026839 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Luke Vianney Varkey | 2024-05-14 |
| D1026054 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Keith A. Miller, Luke Vianney Varkey, Kishor Kalathiparambil | 2024-05-07 |
| D1025935 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Luke Vianney Varkey | 2024-05-07 |
| D1025936 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Luke Vianney Varkey | 2024-05-07 |
| D1024149 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Luke Vianney Varkey | 2024-04-23 |
| 11967523 | Self-assembled monolayer for selective deposition | Kevin Kashefi | 2024-04-23 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
| D1009816 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Kishor Kalathiparambil | 2024-01-02 |
| 11848229 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Bhaskar Jyoti Bhuyan, Mark Saly, Drew Phillips, Aaron Dangerfield +2 more | 2023-12-19 |
| 11756784 | Methods for aluminum oxide surface recovery | Carmen Leal Cervantes, Alexander Jansen | 2023-09-12 |
| 11562925 | Method of depositing multilayer stack including copper over features of a device structure | Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Rui Li, Xianmin Tang | 2023-01-24 |
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11443936 | Methods and apparatus for aluminum oxide surface recovery | Carmen Leal Cervantes, Alexander Jansen | 2022-09-13 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Tae Hong Ha, Xianmin Tang, Lu Chen | 2022-08-09 |
| 11315771 | Methods and apparatus for processing a substrate | Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo, Lanlan Zhong +2 more | 2022-04-26 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Fuhong Zhang, Shirish A. PETHE, Adolph Miller Allen, Lanlan Zhong +1 more | 2022-03-29 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Kishor Kalathiparambil +1 more | 2022-01-11 |