Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203163 | Methods for shaping magnetic fields during semiconductor processing | Goichi Yoshidome, Suhas Bangalore Umesh, Sushil Arun Samant, Martin Lee Riker, Wei Lei +4 more | 2025-01-21 |
| 12027352 | Apparatus for generating magnetic fields on substrates during semiconductor processing | Suhas Bangalore Umesh, Goichi Yoshidome | 2024-07-02 |
| D1026054 | Collimator for a physical vapor deposition (PVD) chamber | Martin Lee Riker, Keith A. Miller, Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Vanessa Faune +1 more | 2024-03-19 |
| D1009816 | Collimator for a physical vapor deposition chamber | Martin Lee Riker, Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Xiangjin Xie | 2024-01-02 |
| D998575 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Fuhong Zhang, Lanlan Zhong | 2023-09-12 |
| D997111 | Collimator for use in a physical vapor deposition (PVD) chamber | Martin Lee Riker, Fuhong Zhang, Lanlan Zhong | 2023-08-29 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Fuhong Zhang, Martin Lee Riker +1 more | 2022-11-08 |
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Vanessa Faune +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani +5 more | 2022-03-29 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Xiangjin Xie +1 more | 2022-01-11 |