Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil +1 more | 2024-03-19 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Adolph Miller Allen, Kirankumar Neelasandra SAVANDAIAH, Randal Dean Schmieding | 2024-03-19 |
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani, Philip Allan Kraus +5 more | 2022-03-29 |
| 11049701 | Biased cover ring for a substrate processing system | Adolph Miller Allen, William Johanson, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson +4 more | 2021-06-29 |
| 11024490 | Magnetron having enhanced target cooling configuration | William Johanson, Kirankumar Neelasandra SAVANDAIAH | 2021-06-01 |