Biased cover ring for a substrate processing system

Assignee

• Applied Materials

Inventors

• Adolph Miller Allen (42 patents)
• William Johanson (25 patents)
• Viachslav Babayan (20 patents)
• Zhong Qiang Hua (26 patents)
• Carl Johnson (5 patents)
• Vanessa Faune (6 patents)
• Jingjing Liu (83 patents)
• Vaibhav Soni (10 patents)
• Kirankumar Neelasandra SAVANDAIAH (81 patents)
• Sundarapandian Ramalinga Vijayalakshmi REDDY (7 patents)

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