Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368024 | Methods and apparatus for processing a substrate | Abdullah Zafar, William J. Durand, Xinyuan Chong, Kenric Choi, Weize Hu +4 more | 2025-07-22 |
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Anthony Chih-Tung Chan, Mehul Chauhan, Goichi Yoshidome | 2024-11-05 |
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Anthony Chih-Tung Chan, Shiyu YUE, Wei-Sheng Lei, Aravind Kamath +2 more | 2024-10-08 |
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2024-09-17 |
| 11932934 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2024-03-19 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Kirankumar Neelasandra SAVANDAIAH, Randal Dean Schmieding, Vanessa Faune | 2024-03-19 |
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Xinyuan Chong +5 more | 2023-12-05 |
| 11810770 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2023-11-07 |
| 11658016 | Shield for a substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Cristopher M. Pavloff | 2023-05-23 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Xinyuan Chong +5 more | 2023-02-21 |
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani, Philip Allan Kraus +5 more | 2022-03-29 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Lanlan Zhong +1 more | 2022-03-29 |
| 11049701 | Biased cover ring for a substrate processing system | William Johanson, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson, Vanessa Faune +4 more | 2021-06-29 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 10972280 | Blockchain for distributed authentication of hardware operating profile | Paul Kiely, Noufal Kappachali | 2021-04-06 |
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Zhong Qiang Hua, Michael W. Stowell, Srinivas D. Nemani, Chentsau Ying +3 more | 2020-12-08 |
| 10811257 | Techniques for forming low stress etch-resistant mask using implantation | Rajesh Prasad, Tzu-Yu Liu, Kyu-Ha Shim, Tom Ho Wing Yu, Zhong Qiang Hua +3 more | 2020-10-20 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang, Xianmin Tang +8 more | 2020-09-01 |
| 10563304 | Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers | Xiangjin Xie, Xianmin Tang, Goichi Yoshidome | 2020-02-18 |
| 10541169 | Method and system for balancing the electrostatic chucking force on a substrate | Chong Jiang, Lei Jing, Mingte Liu, Michael W. Johnson, Pallavi Zhang +1 more | 2020-01-21 |
| 10400327 | Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor | Mohammad Kamruzzaman Chowdhury, Zhenbin Ge | 2019-09-03 |
| 10347475 | Holding assembly for substrate processing chamber | Kathleen Scheible, Michael Allen Flanigan, Goichi Yoshidome, Christopher Pavloff | 2019-07-09 |
| 10283334 | Methods and apparatus for maintaining low non-uniformity over target life | William Johanson, Fuhong Zhang, Yu Liu | 2019-05-07 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee +2 more | 2019-05-07 |