Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325909 | EM source for enhanced plasma control | Keith A. Miller, Prashanth Kothnur, Martin Lee Riker, David Gunther, Emily Schooley | 2025-06-10 |
| 12183631 | Methods for copper doped hybrid metallization for line and via | Suketu Arun Parikh, Joung Joo Lee, Lequn Liu | 2024-12-31 |
| 11955382 | Reverse selective etch stop layer | Kevin Kashefi, Mehul Naik, He Ren, Lu Chen, Feng Chen | 2024-04-09 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |
| 11891690 | Molybdenum thin films by oxidation-reduction | Feng Q. Liu, Mark Saly | 2024-02-06 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Yu Lei, Xianmin Tang +2 more | 2023-10-03 |
| 11756784 | Methods for aluminum oxide surface recovery | Carmen Leal Cervantes, Xiangjin Xie | 2023-09-12 |
| 11692262 | EM source for enhanced plasma control | Keith A. Miller, Prashanth Kothnur, Martin Lee Riker, David Gunther, Emily Schooley | 2023-07-04 |
| 11443936 | Methods and apparatus for aluminum oxide surface recovery | Carmen Leal Cervantes, Xiangjin Xie | 2022-09-13 |
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Yana Cheng, Randal Dean Schmieding, Yong Cao, Xianmin Tang +1 more | 2021-07-06 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Daping Yao, Joung Joo Lee, Adolph Miller Allen +2 more | 2019-05-07 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Daping Yao, Joung Joo Lee, Adolph Miller Allen +2 more | 2016-10-04 |
| 7962264 | Method and apparatus for adapting a monitoring device of a control unit for a restraint system of a motor vehicle | Markus Fislage, Ruediger Karner, Christophe Kolb | 2011-06-14 |
| 7895478 | Method and device for monitoring a process execution | Ruediger Karner | 2011-02-22 |
| 6824828 | Method for forming multilayer release liners | Wen-Chen Su, Luigi Sartor, Kuolih Tsai, Frank Y. Shih, Daniel Meyer +8 more | 2004-11-30 |
| 5970332 | Method of manufacturing a semiconductor device with a BiCMOS circuit | Armand Pruijmboom, Ronald Koster, Willem Van Der Wel | 1999-10-19 |
| 5824560 | Method of manufacturing a semiconductor device with BICMOS circuit | Willem Van Der Wel, Ronald Koster, Armand Pruijmboom | 1998-10-20 |
| 5508213 | Method of manufacturing a semiconductor device in which a semiconductor zone is formed through diffusion from a strip of polycrystalline silicon | Willem Van Der Wel, Ronald Koster | 1996-04-16 |