| 11854794 |
Semiconductor cleaning equipment and method for cleaning through vias using the same |
Liqiang Cao |
2023-12-26 |
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| 11628456 |
Apparatus for increasing flux from an ampoule |
Kenric Choi, Xiaoxiong Yuan, Mei Chang |
2023-04-18 |
$36,767,000 |
| 11133155 |
Apparatus for depositing metal films with plasma treatment |
Hyman Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more |
2021-09-28 |
$64,178,000 |
| 11059061 |
Apparatus for increasing flux from an ampoule |
Kenric Choi, Xiaoxiong Yuan, Mei Chang |
2021-07-13 |
$86,517,000 |
| 10752990 |
Apparatus and methods to remove residual precursor inside gas lines post-deposition |
Kenric Choi, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma +1 more |
2020-08-25 |
$29,525,000 |
| 10640870 |
Gas feedthrough assembly |
Hyman Lam, Jiang Lu, Dien-Yeh Wu, Can Xu, Paul F. Ma +1 more |
2020-05-05 |
$58,379,000 |
| 10600685 |
Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film |
Jiang Lu, Can Xu, Paul F. Ma, Mei Chang |
2020-03-24 |
$19,108,000 |
| 10453657 |
Apparatus for depositing metal films with plasma treatment |
Hyman Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more |
2019-10-22 |
$16,291,000 |
| 10283345 |
Methods for pre-cleaning conductive materials on a substrate |
Xiangjin Xie, Feng Q. Liu, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more |
2019-05-07 |
$13,988,000 |
| 9506145 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more |
2016-11-29 |
$13,456,000 |
| 9478437 |
Methods for repairing low-k dielectrics using carbon plasma immersion |
Peter I. Porshnev |
2016-10-25 |
$14,930,000 |
| 9460959 |
Methods for pre-cleaning conductive interconnect structures |
Xiangjin Xie, Feng Q. Liu, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more |
2016-10-04 |
$14,162,000 |
| 9364871 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more |
2016-06-14 |
$14,652,000 |
| 8664126 |
Selective deposition of polymer films on bare silicon instead of oxide surface |
— |
2014-03-04 |
$12,560,000 |
| 8492177 |
Methods for quantitative measurement of a plasma immersion process |
Peter I. Porshnev, Martin A. Hilkene, Matthew D. Scotney-Castle, Manoj Vellaikal |
2013-07-23 |
$9,121,000 |
