Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854794 | Semiconductor cleaning equipment and method for cleaning through vias using the same | Liqiang Cao | 2023-12-26 |
| 11628456 | Apparatus for increasing flux from an ampoule | Kenric Choi, Xiaoxiong Yuan, Mei Chang | 2023-04-18 |
| 11133155 | Apparatus for depositing metal films with plasma treatment | Hyman Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2021-09-28 |
| 11059061 | Apparatus for increasing flux from an ampoule | Kenric Choi, Xiaoxiong Yuan, Mei Chang | 2021-07-13 |
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Kenric Choi, Xiaoxiong Yuan, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |
| 10640870 | Gas feedthrough assembly | Hyman Lam, Jiang Lu, Dien-Yeh Wu, Can Xu, Paul F. Ma +1 more | 2020-05-05 |
| 10600685 | Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film | Jiang Lu, Can Xu, Paul F. Ma, Mei Chang | 2020-03-24 |
| 10453657 | Apparatus for depositing metal films with plasma treatment | Hyman Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2019-10-22 |
| 10283345 | Methods for pre-cleaning conductive materials on a substrate | Xiangjin Xie, Feng Q. Liu, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2019-05-07 |
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-11-29 |
| 9478437 | Methods for repairing low-k dielectrics using carbon plasma immersion | Peter I. Porshnev | 2016-10-25 |
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Alexander Jansen, Joung Joo Lee, Adolph Miller Allen +2 more | 2016-10-04 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Scott A. Hendrickson +6 more | 2016-06-14 |
| 8664126 | Selective deposition of polymer films on bare silicon instead of oxide surface | — | 2014-03-04 |
| 8492177 | Methods for quantitative measurement of a plasma immersion process | Peter I. Porshnev, Martin A. Hilkene, Matthew D. Scotney-Castle, Manoj Vellaikal | 2013-07-23 |