Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10570517 | Apparatus and method for UV treatment, chemical treatment, and deposition | Amit Kumar BANSAL, Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Thomas Nowak | 2020-02-25 |
| 9506145 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Abhijit A. Kangude +6 more | 2016-11-29 |
| 9364871 | Method and hardware for cleaning UV chambers | Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Abhijit A. Kangude +6 more | 2016-06-14 |
| 8841629 | Microwave excursion detection for semiconductor processing | Liliya Krivulina, Juan Carlos Rocha, Sanjeev Baluja | 2014-09-23 |
| 8753449 | Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film | Mahendra CHHABRA, Sanjeev Baluja, Tsutomu Kiyohara, Juan Carlos Rocha-Alvarez, Alexandros T. Demos | 2014-06-17 |
| 8657961 | Method for UV based silylation chamber clean | Bo Xie, Alexandros T. Demos, Sanjeev Baluja, Juan Carlos Rocha-Alvarez | 2014-02-25 |
| 8343881 | Silicon dioxide layer deposited with BDEAS | Yong Won Lee, Vladimir Zubkov, Mei-Yee Shek, Li-Qun Xia, Prahallad Iyengar +4 more | 2013-01-01 |
| 8309421 | Dual-bulb lamphead control methodology | Yao-Hung YANG, Abhijit A. Kangude, Sanjeev Baluja, Michael A. Martinelli, Liliya Krivulina +2 more | 2012-11-13 |
| 8203126 | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation | Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more | 2012-06-19 |
| 7777198 | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation | Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more | 2010-08-17 |
| 7692171 | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors | Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tom K. Cho, Hichem M'Saad +2 more | 2010-04-06 |
| 7663121 | High efficiency UV curing system | Thomas Nowak, Juan Carlos Rocha-Alvarez, Andrzej Kaszuba, Dustin W. Ho, Sanjeev Baluja +3 more | 2010-02-16 |
| 7566891 | Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors | Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more | 2009-07-28 |
| 7506654 | Accelerated plasma clean | Shankar N. Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh | 2009-03-24 |
| 6814087 | Accelerated plasma clean | Shankar Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh | 2004-11-09 |
| 6495233 | Apparatus for distributing gases in a chemical vapor deposition system | Inna Shmurun, Gwendolyn D. Jones, Shankar Venkataraman, Son T. Nguyen, I-Chun Liu | 2002-12-17 |
| 6443435 | Vaporization of precursors at point of use | — | 2002-09-03 |
| 6374831 | Accelerated plasma clean | Shankar N. Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh | 2002-04-23 |
| 6311959 | Method and apparatus for generating controlled mixture of organic vapor and inert gas | Son T. Nguyen | 2001-11-06 |
| 6300255 | Method and apparatus for processing semiconductive wafers | Shankar Venkataranan, Inna Shmurun, Son T. Nguyen | 2001-10-09 |