| 10570517 |
Apparatus and method for UV treatment, chemical treatment, and deposition |
Amit Kumar BANSAL, Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Thomas Nowak |
2020-02-25 |
$22,337,000 |
| 9506145 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Abhijit A. Kangude +6 more |
2016-11-29 |
$13,456,000 |
| 9364871 |
Method and hardware for cleaning UV chambers |
Sanjeev Baluja, Alexandros T. Demos, Kelvin Chan, Juan Carlos Rocha-Alvarez, Abhijit A. Kangude +6 more |
2016-06-14 |
$14,652,000 |
| 8841629 |
Microwave excursion detection for semiconductor processing |
Liliya Krivulina, Juan Carlos Rocha, Sanjeev Baluja |
2014-09-23 |
$28,245,000 |
| 8753449 |
Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric film |
Mahendra CHHABRA, Sanjeev Baluja, Tsutomu Kiyohara, Juan Carlos Rocha-Alvarez, Alexandros T. Demos |
2014-06-17 |
$19,996,000 |
| 8657961 |
Method for UV based silylation chamber clean |
Bo Xie, Alexandros T. Demos, Sanjeev Baluja, Juan Carlos Rocha-Alvarez |
2014-02-25 |
$9,855,000 |
| 8343881 |
Silicon dioxide layer deposited with BDEAS |
Yong Won Lee, Vladimir Zubkov, Mei-Yee Shek, Li-Qun Xia, Prahallad Iyengar +4 more |
2013-01-01 |
|
| 8309421 |
Dual-bulb lamphead control methodology |
Yao-Hung YANG, Abhijit A. Kangude, Sanjeev Baluja, Michael A. Martinelli, Liliya Krivulina +2 more |
2012-11-13 |
$6,258,000 |
| 8203126 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more |
2012-06-19 |
$14,750,000 |
| 7777198 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more |
2010-08-17 |
$3,871,000 |
| 7692171 |
Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors |
Andrzei Kaszuba, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Tom K. Cho, Hichem M'Saad +2 more |
2010-04-06 |
|
| 7663121 |
High efficiency UV curing system |
Thomas Nowak, Juan Carlos Rocha-Alvarez, Andrzej Kaszuba, Dustin W. Ho, Sanjeev Baluja +3 more |
2010-02-16 |
$120,639,000 |
| 7566891 |
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors |
Juan Carlos Rocha-Alvarez, Thomas Nowak, Dale R. Du Bois, Sanjeev Baluja, Dustin W. Ho +2 more |
2009-07-28 |
$46,387,000 |
| 7506654 |
Accelerated plasma clean |
Shankar N. Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh |
2009-03-24 |
$16,789,000 |
| 6814087 |
Accelerated plasma clean |
Shankar Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh |
2004-11-09 |
$61,437,000 |
| 6495233 |
Apparatus for distributing gases in a chemical vapor deposition system |
Inna Shmurun, Gwendolyn D. Jones, Shankar Venkataraman, Son T. Nguyen, I-Chun Liu |
2002-12-17 |
$23,857,000 |
| 6443435 |
Vaporization of precursors at point of use |
— |
2002-09-03 |
$21,151,000 |
| 6374831 |
Accelerated plasma clean |
Shankar N. Chandran, Gwendolyn D. Jones, Shankar Venkataraman, Ellie Yieh |
2002-04-23 |
$30,581,000 |
| 6311959 |
Method and apparatus for generating controlled mixture of organic vapor and inert gas |
Son T. Nguyen |
2001-11-06 |
$45,107,000 |
| 6300255 |
Method and apparatus for processing semiconductive wafers |
Shankar Venkataranan, Inna Shmurun, Son T. Nguyen |
2001-10-09 |
$40,152,000 |
