Silicon dioxide layer deposited with BDEAS

Assignee

• Applied Materials

Inventors

• Yong Won Lee (35 patents)
• Unknown
• Mei-Yee Shek (32 patents)
• Li-Qun Xia (196 patents)
• Prahallad Iyengar (10 patents)
• Sanjeev Baluja (104 patents)
• Scott A. Hendrickson (20 patents)
• Juan Carlos Rocha-Alvarez (153 patents)
• Thomas Nowak (56 patents)
• Derek R. Witty (39 patents)

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