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Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections |
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Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
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| 7909595 |
Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections |
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2011-03-22 |
| 7777198 |
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
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2010-08-17 |
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Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors |
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2009-07-28 |
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Substrate support with clamping electrical connector |
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2008-04-08 |
