Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8409355 | Low profile process kit | Muhammad M. Rasheed, Teruki Iwashita, Hiroshi Otake, Yuki Koga, Xinglong Chen +2 more | 2013-04-02 |
| 7354288 | Substrate support with clamping electrical connector | Visweswaren Sivaramakrishnan, Kentaro WADA, Mark Fodor, Andrzei Kaszuba | 2008-04-08 |